Evolution of Ferroelectricity With Annealing Temperature and Thickness in Sputter Deposited Undoped HfO2 on Silicon
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Title
Evolution of Ferroelectricity With Annealing Temperature and Thickness in Sputter Deposited Undoped HfO2 on Silicon
Authors
Keywords
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Journal
IEEE TRANSACTIONS ON ELECTRON DEVICES
Volume 70, Issue 11, Pages 6034-6041
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2023-10-17
DOI
10.1109/ted.2023.3319278
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