Evolution of Ferroelectricity With Annealing Temperature and Thickness in Sputter Deposited Undoped HfO2 on Silicon

Title
Evolution of Ferroelectricity With Annealing Temperature and Thickness in Sputter Deposited Undoped HfO2 on Silicon
Authors
Keywords
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Journal
IEEE TRANSACTIONS ON ELECTRON DEVICES
Volume 70, Issue 11, Pages 6034-6041
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2023-10-17
DOI
10.1109/ted.2023.3319278

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