Chemical etching of Tungsten thin films for high-temperature surface acoustic wave-based sensor devices

Published 2016 View Full Article

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Title
Chemical etching of Tungsten thin films for high-temperature surface acoustic wave-based sensor devices
Authors
Keywords
SAW devices, Tungsten electrodes, Magnetron sputtering, Wet-chemical etching, Lift-off structuring
Journal
THIN SOLID FILMS
Volume 612, Issue -, Pages 322-326
Publisher
Elsevier BV
Online
2016-05-13
DOI
10.1016/j.tsf.2016.04.035

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