Ultra-thin Hf0.5Zr0.5O2 thin-film-based ferroelectric tunnel junction via stress induced crystallization

Title
Ultra-thin Hf0.5Zr0.5O2 thin-film-based ferroelectric tunnel junction via stress induced crystallization
Authors
Keywords
-
Journal
APPLIED PHYSICS LETTERS
Volume 117, Issue 24, Pages 242901
Publisher
AIP Publishing
Online
2020-12-14
DOI
10.1063/5.0029516

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