Interlayer-Engineered Local Epitaxial Templating Induced Enhancement in Polarization (2Pr > 70 μC/cm2) in Hf0.5Zr0.5O2 Thin Films
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Title
Interlayer-Engineered Local Epitaxial Templating Induced Enhancement in Polarization (2Pr
> 70 μC/cm2) in Hf0.5Zr0.5O2 Thin Films
Authors
Keywords
-
Journal
IEEE TRANSACTIONS ON ELECTRON DEVICES
Volume 70, Issue 7, Pages 3536-3541
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2023-05-30
DOI
10.1109/ted.2023.3277804
References
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