Critical tensile strain and water vapor transmission rate for nanolaminate films grown using Al2O3 atomic layer deposition and alucone molecular layer deposition

Title
Critical tensile strain and water vapor transmission rate for nanolaminate films grown using Al2O3 atomic layer deposition and alucone molecular layer deposition
Authors
Keywords
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Journal
APPLIED PHYSICS LETTERS
Volume 101, Issue 23, Pages 234103
Publisher
AIP Publishing
Online
2012-12-06
DOI
10.1063/1.4766731

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