Low-temperature atomic layer deposition of Al2O3 on blown polyethylene films with plasma-treated surfaces

Optical properties of AlN thin films grown by plasma enhanced atomic layer deposition

(2012) Mustafa Alevli et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Plasma-Assisted Atomic Layer Deposition: Basics, Opportunities, and Challenges

(2011) H. B. Profijt et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Effects of Ar plasma treatment for deposition of ruthenium film by remote plasma atomic layer deposition

(2011) Taeyong Park et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Scalability of plasma enhanced atomic layer deposited ruthenium films for interconnect applications

(2011) J. Swerts et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Effect of temperature and gas velocity on growth per cycle during Al2O3 and ZnO atomic layer deposition at atmospheric pressure

(2011) Moataz Bellah M. Mousa et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Atomic Layer Deposition: An Overview

(2009) Steven M. George   CHEMICAL REVIEWS

Low temperature atomic layer deposition of titania thin films

(2009) G. Triani et al.   THIN SOLID FILMS

Tungsten atomic layer deposition on polymers

(2007) C.A. Wilson et al.   THIN SOLID FILMS