Fatigue properties of atomic-layer-deposited alumina ultra-barriers and their implications for the reliability of flexible organic electronics

Moisture Permeation through Ultrathin TiO$_{2}$ Films Grown by Atomic Layer Deposition

(2012) Seung-Woo Seo et al.   Applied Physics Express

Plasma-assisted atomic layer deposition of Al2O3 and parylene C bi-layer encapsulation for chronic implantable electronics

(2012) Xianzong Xie et al.   APPLIED PHYSICS LETTERS

Comparison of the Stress Distribution and Fatigue Behavior of 10- and 25- $\mu\hbox{m}$-Thick Deep-Reactive-Ion-Etched Si Kilohertz Resonators

(2012) Thomas Straub et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

Permeability and corrosion in ZrO2/Al2O3 nanolaminate and Al2O3 thin films grown by atomic layer deposition on polymers

(2012) Peter F. Carcia et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Atomic layer deposition for photovoltaics: applications and prospects for solar cell manufacturing

(2012) J A van Delft et al.   SEMICONDUCTOR SCIENCE AND TECHNOLOGY

Temperature and humidity effects on the quality factor of a silicon lateral rotary micro-resonator in atmospheric air

(2012) E. Hosseinian et al.   SENSORS AND ACTUATORS A-PHYSICAL

A correlation study between barrier film performance and shelf lifetime of encapsulated organic solar cells

(2012) Namsu Kim et al.   SOLAR ENERGY MATERIALS AND SOLAR CELLS

Critical tensile and compressive strains for cracking of Al2O3 films grown by atomic layer deposition

(2011) Shih-Hui Jen et al.   JOURNAL OF APPLIED PHYSICS

Fatigue-resistant silicon films coated with nanoscale alumina layers

(2011) E.K. Baumert et al.   SCRIPTA MATERIALIA

In-situ inspection of cracking in atomic-layer-deposited barrier films on surface and in buried structures

(2011) Yadong Zhang et al.   THIN SOLID FILMS

Investigation of the low-cycle fatigue mechanism for micron-scale monocrystalline silicon films

(2010) E.K. Baumert et al.   ACTA MATERIALIA

The origin of low water vapor transmission rates through Al2O3/ZrO2 nanolaminate gas-diffusion barriers grown by atomic layer deposition

(2010) J. Meyer et al.   APPLIED PHYSICS LETTERS

Permeation measurements and modeling of highly defective Al2O3 thin films grown by atomic layer deposition on polymers

(2010) P. F. Carcia et al.   APPLIED PHYSICS LETTERS

Thermo-mechanical properties of alumina films created using the atomic layer deposition technique

(2010) David C. Miller et al.   SENSORS AND ACTUATORS A-PHYSICAL

Highly localized surface oxide thickening on polycrystalline silicon thin films during cyclic loading in humid environments

(2009) M. Budnitzki et al.   ACTA MATERIALIA

Al2O3/ZrO2Nanolaminates as Ultrahigh Gas-Diffusion Barriers-A Strategy for Reliable Encapsulation of Organic Electronics

(2009) Jens Meyer et al.   ADVANCED MATERIALS

Fatigue rates of monocrystalline silicon thin films in harsh environments: Influence of stress amplitude, relative humidity, and temperature

(2009) P.-O. Theillet et al.   APPLIED PHYSICS LETTERS

A hybrid encapsulation method for organic electronics

(2009) N. Kim et al.   APPLIED PHYSICS LETTERS

The influence of nanoscale atomic-layer-deposited alumina coating on the fatigue behavior of polycrystalline silicon thin films

(2009) M. Budnitzki et al.   APPLIED PHYSICS LETTERS

The mechanical robustness of atomic-layer- and molecular-layer-deposited coatings on polymer substrates

(2009) David C. Miller et al.   JOURNAL OF APPLIED PHYSICS

High $Q$-Factor In-Plane-Mode Resonant Microsensor Platform for Gaseous/Liquid Environment

(2008) Jae Hyeong Seo et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

Gas Diffusion Barriers on Polymers Using Multilayers Fabricated by Al2O3and Rapid SiO2Atomic Layer Deposition

(2008) Arrelaine A. Dameron et al.   Journal of Physical Chemistry C

Biocompatibility of atomic layer-deposited alumina thin films

(2007) Dudley S. Finch et al.   JOURNAL OF BIOMEDICAL MATERIALS RESEARCH PART A