Atomic layer deposition of perovskite oxides and their epitaxial integration with Si, Ge, and other semiconductors

Atomic layer deposition of quaternary oxide (La,Sr)CoO3−δ thin films

(2015) E. Ahvenniemi et al.   DALTON TRANSACTIONS

Carrier density modulation in a germanium heterostructure by ferroelectric switching

(2015) Patrick Ponath et al.   Nature Communications

Epitaxial c-axis oriented BaTiO3 thin films on SrTiO3-buffered Si(001) by atomic layer deposition

(2014) Thong Q. Ngo et al.   APPLIED PHYSICS LETTERS

Atomic and electronic structure of the ferroelectric BaTiO3/Ge(001) interface

(2014) Kurt D. Fredrickson et al.   APPLIED PHYSICS LETTERS

A Short History of Atomic Layer Deposition: Tuomo Suntola's Atomic Layer Epitaxy

(2014) Riikka L. Puurunen   CHEMICAL VAPOR DEPOSITION

The Quantum Metal Ferroelectric Field-Effect Transistor

(2014) David J. Frank et al.   IEEE TRANSACTIONS ON ELECTRON DEVICES

Incorporation of La in epitaxial SrTiO3 thin films grown by atomic layer deposition on SrTiO3-buffered Si (001) substrates

(2014) Martin D. McDaniel et al.   JOURNAL OF APPLIED PHYSICS

Magnetic Properties of Polycrystalline Bismuth Ferrite Thin Films Grown by Atomic Layer Deposition

(2014) Pasi Jalkanen et al.   Journal of Physical Chemistry Letters

A brief review of atomic layer deposition: from fundamentals to applications

(2014) Richard W. Johnson et al.   Materials Today

New materials for post-Si computing: Ge and GeSn devices

(2014) Suyog Gupta et al.   MRS BULLETIN

The use of atomic layer deposition in advanced nanopatterning

(2014) A. J. M. Mackus et al.   Nanoscale

A Chemical Route to Monolithic Integration of Crystalline Oxides on Semiconductors

(2014) Martin D. McDaniel et al.   Advanced Materials Interfaces

Ultrathin Oriented BiFeO3 Films from Deposition of Atomic Layers with Greatly Improved Leakage and Ferroelectric Properties

(2013) Yen-Ting Liu et al.   ACS Applied Materials & Interfaces

Epitaxial integration of perovskite-based multifunctional oxides on silicon

(2013) Seung-Hyub Baek et al.   ACTA MATERIALIA

Pinhole mediated electrical transport across LaTiO3/SrTiO3 and LaAlO3/SrTiO3 oxide hetero-structures

(2013) Pramod Kumar et al.   APPLIED PHYSICS LETTERS

Atomic Layer Deposition of SrTiO3 Films with Cyclopentadienyl-Based Precursors for Metal–Insulator–Metal Capacitors

(2013) Woongkyu Lee et al.   CHEMISTRY OF MATERIALS

Review on Atomic Layer Deposition and Applications of Oxide Thin Films

(2013) Joice Sophia Ponraj et al.   CRITICAL REVIEWS IN SOLID STATE AND MATERIALS SCIENCES

Stoichiometry of LaAlO3 films grown on SrTiO3 by pulsed laser deposition

(2013) M. Golalikhani et al.   JOURNAL OF APPLIED PHYSICS

Atomic Layer Deposition of BiFeO3 Thin Films Using β-Diketonates and H2O

(2013) Feng Zhang et al.   Journal of Physical Chemistry C

A Facile Route for Producing Single-Crystalline Epitaxial Perovskite Oxide Thin Films

(2013) Andrew R. Akbashev et al.   NANO LETTERS

Perovskite ferroelectric nanomaterials

(2013) Nurxat Nuraje et al.   Nanoscale

Controlling tetragonality and crystalline orientation in BaTiO3nano-layers grown on Si

(2013) S Abel et al.   NANOTECHNOLOGY

Switching of ferroelectric polarization in epitaxial BaTiO3 films on silicon without a conducting bottom electrode

(2013) Catherine Dubourdieu et al.   Nature Nanotechnology

Deposition and x-ray characterization of epitaxial thin films of LaAlO3

(2013) Henrik Hovde Sønsteby et al.   THIN SOLID FILMS

A strong electro-optically active lead-free ferroelectric integrated on silicon

(2013) Stefan Abel et al.   Nature Communications

Growth of Conductive SrRuO3 Films by Combining Atomic Layer Deposited SrO and Chemical Vapor Deposited RuO2 Layers

(2012) Jeong Hwan Han et al.   CHEMISTRY OF MATERIALS

Epitaxial growth of LaAlO3 on SrTiO3-buffered Si (001) substrates by atomic layer deposition

(2012) Thong Q. Ngo et al.   JOURNAL OF CRYSTAL GROWTH

LaAlO3/SrTiO3 Epitaxial Heterostructures by Atomic Layer Deposition

(2012) Nick M. Sbrockey et al.   JOURNAL OF ELECTRONIC MATERIALS

Fluorine contamination in yttrium-doped barium zirconate film deposited by atomic layer deposition

(2012) Jihwan An et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Epitaxial strontium titanate films grown by atomic layer deposition on SrTiO3-buffered Si(001) substrates

(2012) Martin D. McDaniel et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

RECENT PROGRESS OF MULTIFERROIC PEROVSKITE MANGANITES

(2012) SHUAI DONG et al.   MODERN PHYSICS LETTERS B

Heteroepitaxy of La2O3 and La2–xYxO3 on GaAs (111)A by Atomic Layer Deposition: Achieving Low Interface Trap Density

(2012) Xinwei Wang et al.   NANO LETTERS

Band alignment and electronic structure of the anatase TiO2/SrTiO3(001) heterostructure integrated on Si(001)

(2012) Hosung Seo et al.   PHYSICAL REVIEW B

Critical behavior of ferromagnetic perovskite ruthenates

(2012) J.-G. Cheng et al.   PHYSICAL REVIEW B

Two-Dimensional Superconducting Phase inLaTiO3/SrTiO3Heterostructures Induced by High-Mobility Carrier Doping

(2012) J. Biscaras et al.   PHYSICAL REVIEW LETTERS

Atomic layer deposition for photovoltaics: applications and prospects for solar cell manufacturing

(2012) J A van Delft et al.   SEMICONDUCTOR SCIENCE AND TECHNOLOGY

Textured strontium titanate layers on platinum by atomic layer deposition

(2012) T. Blomberg et al.   THIN SOLID FILMS

Plasma-Assisted Atomic Layer Deposition of SrTiO3: Stoichiometry and Crystallinity Studied by Spectroscopic Ellipsometry

(2012) V. Longo et al.   ECS Journal of Solid State Science and Technology

Electrical and Morphological Properties of ALD and AVD Grown Perovskite-Type Dielectrics and Their Stacks for Metal-Insulator-Metal Applications

(2012) M. Lukosius et al.   ECS Journal of Solid State Science and Technology

Epitaxial integration of ferromagnetic correlated oxide LaCoO3 with Si (100)

(2011) A. Posadas et al.   APPLIED PHYSICS LETTERS

Impact of bottom electrode and SrxTiyOz film formation on physical and electrical properties of metal-insulator-metal capacitors

(2011) M. A. Pawlak et al.   APPLIED PHYSICS LETTERS

SrHfO3Films Grown on Si(100) by Plasma-Assisted Atomic Layer Deposition.

(2011) K. Black et al.   CHEMISTRY OF MATERIALS

Atomic Layer Deposition of SrTiO3Thin Films with Highly Enhanced Growth Rate for Ultrahigh Density Capacitors

(2011) Sang Woon Lee et al.   CHEMISTRY OF MATERIALS

Synthesis of SrTiO3 by crystallization of SrO/TiO2 superlattices prepared by atomic layer deposition

(2011) Stefan Riedel et al.   JOURNAL OF APPLIED PHYSICS

Atomic layer deposition of Pb(Zr,Ti)Ox on 4H-SiC for metal-ferroelectric-insulator-semiconductor diodes

(2011) Feng Zhang et al.   JOURNAL OF APPLIED PHYSICS

Gadolinium Scandate: Next Candidate for Alternative Gate Dielectric in CMOS Technology?

(2011) Karol Fröhlich et al.   Journal of Electrical Engineering-Elektrotechnicky Casopis

TiCp*(OMe)3 versus Ti(OMe)4 in Atomic Layer Deposition of TiO2 with Water—Ab Initio Modelling of Atomic Layer Deposition Surface Reactions

(2011) Aleksandra Zydor et al.   JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY

Epitaxy of BaTiO3 thin film on Si(001) using a SrTiO3 buffer layer for non-volatile memory application

(2011) G. Niu et al.   MICROELECTRONIC ENGINEERING

Strain-induced ferromagnetism in LaCoO3: Theory and growth on Si (100)

(2011) A. Posadas et al.   MICROELECTRONIC ENGINEERING

Ultimate Scaling of CMOS Logic Devices with Ge and III–V Materials

(2011) M. Heyns et al.   MRS BULLETIN

Novel materials by atomic layer deposition and molecular layer deposition

(2011) Markku Leskelä et al.   MRS BULLETIN

Academic and industry research progress in germanium nanodevices

(2011) Ravi Pillarisetty   NATURE

Investigation of the effect of different oxygen partial pressure to LaAlO3 thin film properties and resistive switching characteristics

(2011) Kou-Chen Liu et al.   THIN SOLID FILMS

Crystalline Oxides on Silicon

(2010) James W. Reiner et al.   ADVANCED MATERIALS

Heteroepitaxy of single-crystal LaLuO3 on GaAs(111)A by atomic layer deposition

(2010) Yiqun Liu et al.   APPLIED PHYSICS LETTERS

Impact of crystallization behavior of SrxTiyOz films on electrical properties of metal-insulator-metal capacitors with TiN electrodes

(2010) M. A. Pawlak et al.   APPLIED PHYSICS LETTERS

High performance atomic-layer-deposited LaLuO3/Ge-on-insulator p-channel metal-oxide-semiconductor field-effect transistor with thermally grown GeO2 as interfacial passivation layer

(2010) J. J. Gu et al.   APPLIED PHYSICS LETTERS

Formation of strontium template on Si(100) by atomic layer deposition

(2010) C.B. Zhang et al.   APPLIED SURFACE SCIENCE

Rare earth scandate thin films by atomic layer deposition: effect of the rare earth cation size

(2010) Pia Myllymäki et al.   JOURNAL OF MATERIALS CHEMISTRY

Lanthanum titanate and lithium lanthanum titanate thin films grown by atomic layer deposition

(2010) Titta Aaltonen et al.   JOURNAL OF MATERIALS CHEMISTRY

Remote Plasma ALD of SrTiO[sub 3] Using Cyclopentadienlyl-Based Ti and Sr Precursors

(2010) E. Langereis et al.   JOURNAL OF THE ELECTROCHEMICAL SOCIETY

Characterization of group II hafnates and zirconates for metal-insulator-metal capacitors

(2010) Grzegorz Lupina et al.   PHYSICA STATUS SOLIDI B-BASIC SOLID STATE PHYSICS

Oxide Interfaces--An Opportunity for Electronics

(2010) J. Mannhart et al.   SCIENCE

Two-dimensional superconductivity at a Mott insulator/band insulator interface LaTiO3/SrTiO3

(2010) J. Biscaras et al.   Nature Communications

Atomic Layer Deposition of High-kOxides of the Group 4 Metals for Memory Applications

(2009) Jaakko Niinistö et al.   ADVANCED ENGINEERING MATERIALS

Novel Multifunctional Properties Induced by Interface Effects in Perovskite Oxide Heterostructures

(2009) Kui-juan Jin et al.   ADVANCED MATERIALS

Physics and Applications of Bismuth Ferrite

(2009) Gustau Catalan et al.   ADVANCED MATERIALS

Atomic Layer Deposition: An Overview

(2009) Steven M. George   CHEMICAL REVIEWS

Atomic Layer Deposition of Hexagonal and Orthorhombic YMnO3Thin Films

(2009) K. Uusi-Esko et al.   CHEMISTRY OF MATERIALS

Atomic Layer Deposition of Lanthanum-Based Ternary Oxides

(2009) Hongtao Wang et al.   ELECTROCHEMICAL AND SOLID STATE LETTERS

Composition influence on the physical and electrical properties of SrxTi1−xOy-based metal-insulator-metal capacitors prepared by atomic layer deposition using TiN bottom electrodes

(2009) N. Menou et al.   JOURNAL OF APPLIED PHYSICS

Electrical properties and interfacial structure of epitaxial LaAlO3 on Si (001)

(2009) J. W. Reiner et al.   JOURNAL OF APPLIED PHYSICS

Atomic Layer Deposition of Strontium Titanate Films Using Sr([sup t]Bu[sub 3]Cp)[sub 2] and Ti(OMe)[sub 4]

(2009) M. Popovici et al.   JOURNAL OF THE ELECTROCHEMICAL SOCIETY

Commercial molecular beam epitaxy production of high quality SrTiO[sub 3] on large diameter Si substrates

(2009) X. Gu et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

Effect of high-temperature annealing on lanthanum aluminate thin films grown by ALD on Si(100)

(2009) G. Congedo et al.   MICROELECTRONIC ENGINEERING

A Ferroelectric Oxide Made Directly on Silicon

(2009) M. P. Warusawithana et al.   SCIENCE

Functional Perovskites - From Epitaxial Films to Nanostructured Arrays

(2008) Ionela Vrejoiu et al.   ADVANCED FUNCTIONAL MATERIALS

Interfaces in perovskite heterostructures

(2008) Hans M. Christen et al.   APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING

Enhanced electrical properties of SrTiO3 thin films grown by atomic layer deposition at high temperature for dynamic random access memory applications

(2008) Sang Woon Lee et al.   APPLIED PHYSICS LETTERS

Growth of La1−xSrxFeO3thin films by atomic layer deposition

(2008) Martin Lie et al.   DALTON TRANSACTIONS

Atomic Layer Deposition of ZrO2 Thin Films with High Dielectric Constant on TiN Substrates

(2008) Seong Keun Kim et al.   ELECTROCHEMICAL AND SOLID STATE LETTERS

Thermal Annealing Effects on the Atomic Layer Deposited LaAlO[sub 3] Thin Films on Si Substrate

(2008) Dail Eom et al.   ELECTROCHEMICAL AND SOLID STATE LETTERS

Properties of rare-earth scandate single crystals (Re=Nd−Dy)

(2008) R. Uecker et al.   JOURNAL OF CRYSTAL GROWTH

Influences of a Crystalline Seed Layer during Atomic Layer Deposition of SrTiO[sub 3] Thin Films Using Ti(O-iPr)[sub 2](thd)[sub 2], Sr(thd)[sub 2], and H[sub 2]O

(2008) Sang Woon Lee et al.   JOURNAL OF THE ELECTROCHEMICAL SOCIETY

Effect of Sr–Ruthenate Seed Layer on Dielectric Properties of SrTiO[sub 3] Thin Films Prepared by Plasma-Enhanced Atomic Layer Deposition

(2008) Ji-Hoon Ahn et al.   JOURNAL OF THE ELECTROCHEMICAL SOCIETY

Growth Behavior of Atomic-Layer-Deposited Pb(Zr,Ti)O[sub x] Thin Films on Planar Substrate and Three-Dimensional Hole Structures

(2008) Takayuki Watanabe et al.   JOURNAL OF THE ELECTROCHEMICAL SOCIETY

High-k/Ge MOSFETs for future nanoelectronics

(2008) Yoshiki Kamata   Materials Today

Atomic layer deposition of LSM cathodes for solid oxide fuel cells

(2008) Timothy P. Holme et al.   SOLID STATE IONICS

Characterization of lanthanum lutetium oxide thin films grown by atomic layer deposition as an alternative gate dielectric

(2008) M. Roeckerath et al.   THIN SOLID FILMS