The use of atomic layer deposition in advanced nanopatterning

A New Resist for Area Selective Atomic and Molecular Layer Deposition on Metal–Dielectric Patterns

(2014) Fatemeh Sadat Minaye Hashemi et al.   Journal of Physical Chemistry C

In Situ Synthesis of High Density sub-50 nm ZnO Nanopatterned Arrays Using Diblock Copolymer Templates

(2013) Vignesh Suresh et al.   ACS Applied Materials & Interfaces

Area Selective Molecular Layer Deposition of Polyurea Films

(2013) Chaiya Prasittichai et al.   ACS Applied Materials & Interfaces

Membranes with Highly Ordered Straight Nanopores by Selective Swelling of Fast Perpendicularly Aligned Block Copolymers

(2013) Jun Yin et al.   ACS Nano

Gyroid-Structured 3D ZnO Networks Made by Atomic Layer Deposition

(2013) Ellie Kim et al.   ADVANCED FUNCTIONAL MATERIALS

Metal-oxide thin-film transistors patterned by printing

(2013) David H. Levy et al.   APPLIED PHYSICS LETTERS

Influence of Oxygen Exposure on the Nucleation of Platinum Atomic Layer Deposition: Consequences for Film Growth, Nanopatterning, and Nanoparticle Synthesis

(2013) Adriaan J. M. Mackus et al.   CHEMISTRY OF MATERIALS

Direct-Write Atomic Layer Deposition of High-Quality Pt Nanostructures: Selective Growth Conditions and Seed Layer Requirements

(2013) A. J. M. Mackus et al.   Journal of Physical Chemistry C

Catalytic Combustion Reactions During Atomic Layer Deposition of Ru Studied Using 18O2 Isotope Labeling

(2013) N. Leick et al.   Journal of Physical Chemistry C

Controlling the Atomic Layer Deposition of Titanium Dioxide on Silicon: Dependence on Surface Termination

(2013) Stephen McDonnell et al.   Journal of Physical Chemistry C

Selective atomic layer deposition of zirconia on copper patterned silicon substrates using ethanol as oxygen source as well as copper reductant

(2013) Sathees Kannan Selvaraj et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Growth of Pt Nanowires by Atomic Layer Deposition on Highly Ordered Pyrolytic Graphite

(2013) Han-Bo-Ram Lee et al.   NANO LETTERS

Highly ordered freestanding titanium oxide nanotube arrays using Si-containing block copolymer lithography and atomic layer deposition

(2013) Se Jin Ku et al.   NANOTECHNOLOGY

Obtaining nanoimprint template gratings with 10 nm half-pitch by atomic layer deposition enabled spacer double patterning

(2013) S Dhuey et al.   NANOTECHNOLOGY

Nanofabrication with metallopolymers - recent developments and future perspectives

(2013) Muruganathan Ramanathan et al.   POLYMER INTERNATIONAL

Integration of atomic layer deposition CeO2 thin films with functional complex oxides and 3D patterns

(2013) M. Coll et al.   THIN SOLID FILMS

Emerging trends in metal-containing block copolymers: synthesis, self-assembly, and nanomanufacturing applications

(2013) Muruganathan Ramanathan et al.   Journal of Materials Chemistry C

Chemically Enhancing Block Copolymers for Block-Selective Synthesis of Self-Assembled Metal Oxide Nanostructures

(2012) Jovan Kamcev et al.   ACS Nano

Dry Lithography of Large-Area, Thin-Film Organic Semiconductors Using Frozen CO2Resists

(2012) Matthias E. Bahlke et al.   ADVANCED MATERIALS

Enhanced Lithographic Imaging Layer Meets Semiconductor Manufacturing Specification a Decade Early

(2012) Yu-Chih Tseng et al.   ADVANCED MATERIALS

New Challenges in Heterogeneous Catalysis for the 21st Century

(2012) Francisco Zaera   CATALYSIS LETTERS

Nucleation-Controlled Growth of Nanoparticles by Atomic Layer Deposition

(2012) Han-Bo-Ram Lee et al.   CHEMISTRY OF MATERIALS

Substrate Selectivity of (tBu-Allyl)Co(CO)3 during Thermal Atomic Layer Deposition of Cobalt

(2012) Jinhee Kwon et al.   CHEMISTRY OF MATERIALS

Low Temperature Epitaxial Oxide Ultrathin Films and Nanostructures by Atomic Layer Deposition

(2012) Mariona Coll et al.   CHEMISTRY OF MATERIALS

Catalytic Combustion and Dehydrogenation Reactions during Atomic Layer Deposition of Platinum

(2012) Adriaan J. M. Mackus et al.   CHEMISTRY OF MATERIALS

Supported Core/Shell Bimetallic Nanoparticles Synthesis by Atomic Layer Deposition

(2012) Matthieu J. Weber et al.   CHEMISTRY OF MATERIALS

Robust, High-Density Zinc Oxide Nanoarrays by Nanoimprint Lithography-Assisted Area-Selective Atomic Layer Deposition

(2012) Vignesh Suresh et al.   Journal of Physical Chemistry C

Highly Porous Metal Oxide Networks of Interconnected Nanotubes by Atomic Layer Deposition

(2012) Fengbin Li et al.   NANO LETTERS

Nanopatterning by direct-write atomic layer deposition

(2012) A. J. M. Mackus et al.   Nanoscale

Passivation of copper surfaces for selective-area ALD using a thiol self-assembled monolayer

(2012) Elina Färm et al.   SEMICONDUCTOR SCIENCE AND TECHNOLOGY

On the initial growth of atomic layer deposited TiO2 films on silicon and copper surfaces

(2012) Qian Tao et al.   THIN SOLID FILMS

Highly ordered TiO2nanostructures by sequential vapour infiltration of block copolymer micellar films in an atomic layer deposition reactor

(2012) Jun Yin et al.   Journal of Materials Chemistry C

A Route to Nanoscopic Materials via Sequential Infiltration Synthesis on Block Copolymer Templates

(2011) Qing Peng et al.   ACS Nano

The effect of chemical residues on the physical and electrical properties of chemical vapor deposited graphene transferred to SiO2

(2011) A. Pirkle et al.   APPLIED PHYSICS LETTERS

Microcontact Printed RuOx Film as an Activation Layer for Selective-Area Atomic Layer Deposition of Ruthenium

(2011) Elina Färm et al.   CHEMISTRY OF MATERIALS

Recent advances in catalysts for direct methanol fuel cells

(2011) Xiao Zhao et al.   Energy & Environmental Science

Plasma etching: From micro- to nanoelectronics

(2011) D. Shamiryan et al.   HIGH ENERGY CHEMISTRY

Enhanced Block Copolymer Lithography Using Sequential Infiltration Synthesis

(2011) Yu-Chih Tseng et al.   Journal of Physical Chemistry C

Plasma-Assisted Atomic Layer Deposition: Basics, Opportunities, and Challenges

(2011) H. B. Profijt et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Thin-film electronics by atomic layer deposition

(2011) David H. Levy et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Selective atomic layer deposition with electron-beam patterned self-assembled monolayers

(2011) Jie Huang et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Graphene Annealing: How Clean Can It Be?

(2011) Yung-Chang Lin et al.   NANO LETTERS

The fabrication of tunable nanoporous oxide surfaces by block copolymer lithography and atomic layer deposition

(2011) A Andreozzi et al.   NANOTECHNOLOGY

Single digit nanofabrication by step-and-repeat nanoimprint lithography

(2011) C Peroz et al.   NANOTECHNOLOGY

Nanolithography in microelectronics: A review

(2011) R. P. Seisyan   TECHNICAL PHYSICS

Rectangular Patterns Using Block Copolymer Directed Assembly for High Bit Aspect Ratio Patterned Media

(2010) Ricardo Ruiz et al.   ACS Nano

Nanoscopic Patterned Materials with Tunable Dimensions via Atomic Layer Deposition on Block Copolymers

(2010) Qing Peng et al.   ADVANCED MATERIALS

Low-Temperature ABC-Type Atomic Layer Deposition: Synthesis of Highly Uniform Ultrafine Supported Metal Nanoparticles

(2010) Junling Lu et al.   ANGEWANDTE CHEMIE-INTERNATIONAL EDITION

Graphene field-effect transistors with self-aligned gates

(2010) Damon B. Farmer et al.   APPLIED PHYSICS LETTERS

Selective atomic layer deposition of HfO2 on copper patterned silicon substrates

(2010) Qian Tao et al.   APPLIED PHYSICS LETTERS

Local deposition of high-purity Pt nanostructures by combining electron beam induced deposition and atomic layer deposition

(2010) A. J. M. Mackus et al.   JOURNAL OF APPLIED PHYSICS

Area Selective Atomic Layer Deposition by Microcontact Printing with a Water-Soluble Polymer

(2010) Marja N. Mullings et al.   JOURNAL OF THE ELECTROCHEMICAL SOCIETY

Atomic Layer Deposition of Ni Thin Films and Application to Area-Selective Deposition

(2010) Woo-Hee Kim et al.   JOURNAL OF THE ELECTROCHEMICAL SOCIETY

?The Degradation of Deposition Blocking Layer during Area Selective Plasma Enhanced Atomic Layer Deposition of Cobalt

(2010) Hyungjun Kim et al.   JOURNAL OF THE KOREAN PHYSICAL SOCIETY

Area-Selective Atomic Layer Deposition of Lead Sulfide: Nanoscale Patterning and DFT Simulations

(2010) Wonyoung Lee et al.   LANGMUIR

CMOS compatible strategy based on selective atomic layer deposition of a hard mask for transferring block copolymer lithography patterns

(2010) G Gay et al.   NANOTECHNOLOGY

Nanoscopic Morphologies in Block Copolymer Nanorods as Templates for Atomic-Layer Deposition of Semiconductors

(2009) Yong Wang et al.   ADVANCED MATERIALS

Atomic Layer Deposition: An Overview

(2009) Steven M. George   CHEMICAL REVIEWS

Controlled Fabrication of Multiwall Anatase TiO2Nanotubular Architectures

(2009) Changdeuck Bae et al.   CHEMISTRY OF MATERIALS

Remote Plasma ALD of Platinum and Platinum Oxide Films

(2009) H. C. M. Knoops et al.   ELECTROCHEMICAL AND SOLID STATE LETTERS

Oxide Electronics by Spatial Atomic Layer Deposition

(2009) David H. Levy et al.   Journal of Display Technology

Origin of the Difference in the Resistivity of As-Grown Focused-Ion- and Focused-Electron-Beam-Induced Pt Nanodeposits

(2009) J. M. De Teresa et al.   Journal of Nanomaterials

Area-Selective ALD with Soft Lithographic Methods: Using Self-Assembled Monolayers to Direct Film Deposition

(2009) Xirong Jiang et al.   Journal of Physical Chemistry C

Copper−Metal Deposition on Self Assembled Monolayer for Making Top Contacts in Molecular Electronic Devices

(2009) Oliver Seitz et al.   JOURNAL OF THE AMERICAN CHEMICAL SOCIETY

Advancing the Frontiers in Nanocatalysis, Biointerfaces, and Renewable Energy Conversion by Innovations of Surface Techniques

(2009) Gabor A. Somorjai et al.   JOURNAL OF THE AMERICAN CHEMICAL SOCIETY

Area-Selective Atomic Layer Deposition Using Self-Assembled Monolayer and Scanning Probe Lithography

(2009) Wonyoung Lee et al.   JOURNAL OF THE ELECTROCHEMICAL SOCIETY

Selective-Area Atomic Layer Deposition Using Poly(vinyl pyrrolidone) as a Passivation Layer

(2009) Elina Färm et al.   JOURNAL OF THE ELECTROCHEMICAL SOCIETY

High Quality Area-Selective Atomic Layer Deposition Co Using Ammonia Gas as a Reactant

(2009) Han-Bo-Ram Lee et al.   JOURNAL OF THE ELECTROCHEMICAL SOCIETY

Atomic Layer Deposition of Aluminum Oxide on Carboxylic Acid-Terminated Self-Assembled Monolayers

(2009) Meng Li et al.   LANGMUIR

Resists for sub-20-nm electron beam lithography with a focus on HSQ: state of the art

(2009) A E Grigorescu et al.   NANOTECHNOLOGY

Selective-Area Atomic Layer Deposition Using Poly(methyl methacrylate) Films as Mask Layers

(2008) Elina Färm et al.   Journal of Physical Chemistry C

Generation of Oxide Nanopatterns by Combining Self-Assembly of S-Layer Proteins and Area-Selective Atomic Layer Deposition

(2008) Jiurong Liu et al.   JOURNAL OF THE AMERICAN CHEMICAL SOCIETY

Blocking the Lateral Film Growth at the Nanoscale in Area-Selective Atomic Layer Deposition

(2008) Robin H. A. Ras et al.   JOURNAL OF THE AMERICAN CHEMICAL SOCIETY

Nanopatterning materials using area selective atomic layer deposition in conjunction with thermochemical surface modification via heated AFM cantilever probe lithography

(2008) Yueming Hua et al.   MICROELECTRONIC ENGINEERING

Ru–Pt core–shell nanoparticles for preferential oxidation of carbon monoxide in hydrogen

(2008) Selim Alayoglu et al.   NATURE MATERIALS

Selective-area atomic layer deposition with microcontact printed self-assembled octadecyltrichlorosilane monolayers as mask layers

(2008) Elina Färm et al.   THIN SOLID FILMS