A Short History of Atomic Layer Deposition: Tuomo Suntola's Atomic Layer Epitaxy

Published 2014 View Full Article

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Title
A Short History of Atomic Layer Deposition: Tuomo Suntola's Atomic Layer Epitaxy
Authors
Keywords
-
Journal
CHEMICAL VAPOR DEPOSITION
Volume 20, Issue 10-11-12, Pages 332-344
Publisher
Wiley
Online
2014-10-15
DOI
10.1002/cvde.201402012
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