Atomic Layer Deposition of ZrO2 Thin Films with High Dielectric Constant on TiN Substrates

Published 2008 View Full Article

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Title
Atomic Layer Deposition of ZrO2 Thin Films with High Dielectric Constant on TiN Substrates
Authors
Keywords
-
Journal
ELECTROCHEMICAL AND SOLID STATE LETTERS
Volume 11, Issue 3, Pages G9
Publisher
The Electrochemical Society
Online
2008-01-24
DOI
10.1149/1.2825763

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