Growth of Conductive SrRuO3 Films by Combining Atomic Layer Deposited SrO and Chemical Vapor Deposited RuO2 Layers

Published 2012 View Full Article

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Title
Growth of Conductive SrRuO3 Films by Combining Atomic Layer Deposited SrO and Chemical Vapor Deposited RuO2 Layers
Authors
Keywords
-
Journal
CHEMISTRY OF MATERIALS
Volume 24, Issue 24, Pages 4686-4692
Publisher
American Chemical Society (ACS)
Online
2012-11-30
DOI
10.1021/cm302470k

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