SrHfO3Films Grown on Si(100) by Plasma-Assisted Atomic Layer Deposition.

Published 2011 View Full Article

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Title
SrHfO3Films Grown on Si(100) by Plasma-Assisted Atomic Layer Deposition.
Authors
Keywords
-
Journal
CHEMISTRY OF MATERIALS
Volume 23, Issue 10, Pages 2518-2520
Publisher
American Chemical Society (ACS)
Online
2011-04-27
DOI
10.1021/cm200315u

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