Enhanced electrical properties of SrTiO3 thin films grown by atomic layer deposition at high temperature for dynamic random access memory applications

Published 2008 View Full Article

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Title
Enhanced electrical properties of SrTiO3 thin films grown by atomic layer deposition at high temperature for dynamic random access memory applications
Authors
Keywords
-
Journal
APPLIED PHYSICS LETTERS
Volume 92, Issue 22, Pages 222903
Publisher
AIP Publishing
Online
2008-06-04
DOI
10.1063/1.2939102

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