Effect of Sr–Ruthenate Seed Layer on Dielectric Properties of SrTiO[sub 3] Thin Films Prepared by Plasma-Enhanced Atomic Layer Deposition

Published 2008 View Full Article

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Title
Effect of Sr–Ruthenate Seed Layer on Dielectric Properties of SrTiO[sub 3] Thin Films Prepared by Plasma-Enhanced Atomic Layer Deposition
Authors
Keywords
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Journal
JOURNAL OF THE ELECTROCHEMICAL SOCIETY
Volume 155, Issue 10, Pages G185
Publisher
The Electrochemical Society
Online
2008-09-06
DOI
10.1149/1.2960898

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