Enhancement-mode AlGaN/GaN HEMTs with thin and high Al composition barrier layers using O2plasma implantation

Title
Enhancement-mode AlGaN/GaN HEMTs with thin and high Al composition barrier layers using O2plasma implantation
Authors
Keywords
-
Journal
Publisher
Wiley
Online
2014-10-20
DOI
10.1002/pssa.201431585

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