4.6 Article

Quality of the Oxidation Interface of AlGaN in Enhancement-Mode AlGaN/GaN High-Electron Mobility Transistors

Journal

IEEE TRANSACTIONS ON ELECTRON DEVICES
Volume 59, Issue 12, Pages 3334-3338

Publisher

IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TED.2012.2215872

Keywords

Enhancement-mode (E-mode); GaN; high-electron mobility transistor (HEMT); N2O treatment; O-2 treatment

Funding

  1. National Science Council [NSC-101-2221-E-182-043-MY3]

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Enhancement-mode AlGaN/GaN high-electron mobility transistors (HEMTs) were realized by applying the O-2 and N2O plasma oxidation method to the AlGaN Schottky layers. After the postannealing process, the threshold voltage V-th of conventional depletion-mode GaN HEMTs was -3.1 V, and this value was shifted to +0.3 V when either N2O or O-2 plasma oxidation treatment was used. X-ray photoelectron spectroscopy (XPS) analysis revealed that both treatments formed an Al2O3/Ga2O3 compound oxide layer. The decomposition of N-O bonds in the N2O plasma suppressed the formation of nitrogen vacancy traps and ensured low roughness of the AlGaN surface during oxidation. This nitridation process also reduced the 1/f noise.

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