Substrate Selectivity of (tBu-Allyl)Co(CO)3 during Thermal Atomic Layer Deposition of Cobalt

Title
Substrate Selectivity of (tBu-Allyl)Co(CO)3 during Thermal Atomic Layer Deposition of Cobalt
Authors
Keywords
-
Journal
CHEMISTRY OF MATERIALS
Volume 24, Issue 6, Pages 1025-1030
Publisher
American Chemical Society (ACS)
Online
2012-02-15
DOI
10.1021/cm2029189

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