The fabrication of tunable nanoporous oxide surfaces by block copolymer lithography and atomic layer deposition

Published 2011 View Full Article

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Title
The fabrication of tunable nanoporous oxide surfaces by block copolymer lithography and atomic layer deposition
Authors
Keywords
-
Journal
NANOTECHNOLOGY
Volume 22, Issue 33, Pages 335303
Publisher
IOP Publishing
Online
2011-07-28
DOI
10.1088/0957-4484/22/33/335303

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