Nanolithography in microelectronics: A review

Published 2011 View Full Article

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Title
Nanolithography in microelectronics: A review
Authors
Keywords
-
Journal
TECHNICAL PHYSICS
Volume 56, Issue 8, Pages 1061-1073
Publisher
Pleiades Publishing Ltd
Online
2011-08-05
DOI
10.1134/s1063784211080214
References
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