?The Degradation of Deposition Blocking Layer during Area Selective Plasma Enhanced Atomic Layer Deposition of Cobalt

Published 2010 View Full Article

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Title
?The Degradation of Deposition Blocking Layer during Area Selective Plasma Enhanced Atomic Layer Deposition of Cobalt
Authors
Keywords
-
Journal
JOURNAL OF THE KOREAN PHYSICAL SOCIETY
Volume 56, Issue 1, Pages 104-107
Publisher
Korean Physical Society
Online
2010-01-18
DOI
10.3938/jkps.56.104

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