Plasma potential mapping of high power impulse magnetron sputtering discharges
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Title
Plasma potential mapping of high power impulse magnetron sputtering discharges
Authors
Keywords
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Journal
JOURNAL OF APPLIED PHYSICS
Volume 111, Issue 8, Pages 083302
Publisher
AIP Publishing
Online
2012-04-24
DOI
10.1063/1.3700242
References
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Related references
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