Observation of Ti4+ ions in a high power impulse magnetron sputtering plasma

Title
Observation of Ti4+ ions in a high power impulse magnetron sputtering plasma
Authors
Keywords
-
Journal
APPLIED PHYSICS LETTERS
Volume 93, Issue 7, Pages 071504
Publisher
AIP Publishing
Online
2008-08-21
DOI
10.1063/1.2973179

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