Time evolution of ion energies in HIPIMS of chromium plasma discharge

Published 2009 View Full Article

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Title
Time evolution of ion energies in HIPIMS of chromium plasma discharge
Authors
Keywords
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Journal
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 42, Issue 13, Pages 135209
Publisher
IOP Publishing
Online
2009-06-20
DOI
10.1088/0022-3727/42/13/135209

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