Time- and Species-Resolved Plasma Imaging as a New Diagnostic Approach for HiPIMS Discharge Characterization

Published 2010 View Full Article

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Title
Time- and Species-Resolved Plasma Imaging as a New Diagnostic Approach for HiPIMS Discharge Characterization
Authors
Keywords
-
Journal
IEEE TRANSACTIONS ON PLASMA SCIENCE
Volume 38, Issue 11, Pages 3035-3039
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2010-09-09
DOI
10.1109/tps.2010.2064183

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