Discharge physics of high power impulse magnetron sputtering

Published 2011 View Full Article

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Title
Discharge physics of high power impulse magnetron sputtering
Authors
Keywords
-
Journal
SURFACE & COATINGS TECHNOLOGY
Volume 205, Issue -, Pages S1-S9
Publisher
Elsevier BV
Online
2011-04-16
DOI
10.1016/j.surfcoat.2011.03.081

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