标题
Plasma potential mapping of high power impulse magnetron sputtering discharges
作者
关键词
-
出版物
JOURNAL OF APPLIED PHYSICS
Volume 111, Issue 8, Pages 083302
出版商
AIP Publishing
发表日期
2012-04-24
DOI
10.1063/1.3700242
参考文献
相关参考文献
注意:仅列出部分参考文献,下载原文获取全部文献信息。- Drifting localization of ionization runaway: Unraveling the nature of anomalous transport in high power impulse magnetron sputtering
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