Drifting localization of ionization runaway: Unraveling the nature of anomalous transport in high power impulse magnetron sputtering

Title
Drifting localization of ionization runaway: Unraveling the nature of anomalous transport in high power impulse magnetron sputtering
Authors
Keywords
-
Journal
JOURNAL OF APPLIED PHYSICS
Volume 111, Issue 5, Pages 053304
Publisher
AIP Publishing
Online
2012-03-09
DOI
10.1063/1.3692978

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