The evolution of the plasma potential in a HiPIMS discharge and its relationship to deposition rate

Published 2010 View Full Article

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Title
The evolution of the plasma potential in a HiPIMS discharge and its relationship to deposition rate
Authors
Keywords
-
Journal
PLASMA SOURCES SCIENCE & TECHNOLOGY
Volume 19, Issue 4, Pages 045014
Publisher
IOP Publishing
Online
2010-06-16
DOI
10.1088/0963-0252/19/4/045014
References
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