Spatial and temporal investigation of high power pulsed magnetron discharges by optical 2D-imaging

Title
Spatial and temporal investigation of high power pulsed magnetron discharges by optical 2D-imaging
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 519, Issue 5, Pages 1699-1704
Publisher
Elsevier BV
Online
2010-07-02
DOI
10.1016/j.tsf.2010.06.055

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