Origins of ion energy distribution function (IEDF) in high power impulse magnetron sputtering (HIPIMS) plasma discharge

Published 2008 View Full Article

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Title
Origins of ion energy distribution function (IEDF) in high power impulse magnetron sputtering (HIPIMS) plasma discharge
Authors
Keywords
-
Journal
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 41, Issue 9, Pages 095203
Publisher
IOP Publishing
Online
2008-04-04
DOI
10.1088/0022-3727/41/9/095203

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