GaAs milling with neon focused ion beam: Comparison with gallium focused ion beam milling and subsurface damage analysis
出版年份 2020 全文链接
标题
GaAs milling with neon focused ion beam: Comparison with gallium focused ion beam milling and subsurface damage analysis
作者
关键词
Semiconductor, GaAs, Focused ion beam, Helium ion microscope, Milling, Nanopatterning
出版物
APPLIED SURFACE SCIENCE
Volume 538, Issue -, Pages 147922
出版商
Elsevier BV
发表日期
2020-09-19
DOI
10.1016/j.apsusc.2020.147922
参考文献
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- (2020) Yunsheng Deng et al. NANOTECHNOLOGY
- Defect Localization and Nanofabrication for Conductive Structures with Voltage Contrast in Helium Ion Microscopy
- (2019) Deying Xia et al. ACS Applied Materials & Interfaces
- A Review of Recent Applications of Ion Beam Techniques on Nanomaterial Surface Modification: Design of Nanostructures and Energy Harvesting
- (2019) Wenqing Li et al. Small
- Focused-helium-ion-beam blow forming of nanostructures: radiation damage and nanofabrication
- (2019) Chung-Soo Kim et al. NANOTECHNOLOGY
- Key mechanistic features of swelling and blistering of helium-ion-irradiated tungsten
- (2019) Frances I. Allen et al. SCRIPTA MATERIALIA
- Ion irradiation of III–V semiconductor surfaces: From self-assembled nanostructures to plasmonic crystals
- (2019) M. Kang et al. Applied Physics Reviews
- He-Ion Microscopy as a High-Resolution Probe for Complex Quantum Heterostructures in Core–Shell Nanowires
- (2018) Christian Pöpsel et al. NANO LETTERS
- Rapid and damage-free outgassing of implanted helium from amorphous silicon oxycarbide
- (2018) Qing Su et al. Scientific Reports
- Ion-Induced Localized Nanoscale Polymer Reflow for Three-Dimensional Self-Assembly
- (2018) Chunhui Dai et al. ACS Nano
- Rapid fabrication of solid-state nanopores with high reproducibility over a large area using a helium ion microscope
- (2018) Deying Xia et al. Nanoscale
- Utilizing Neon Ion Microscope for GaSb nanopatterning studies: Nanostructure formation and comparison with low energy nanopatterning
- (2016) Osman El-Atwani et al. APPLIED SURFACE SCIENCE
- Ion-Beam-Directed Self-Ordering of Ga Nanodroplets on GaAs Surfaces
- (2016) Xingliang Xu et al. Nanoscale Research Letters
- Ion-Beam-Directed Self-Ordering of Ga Nanodroplets on GaAs Surfaces
- (2016) Xingliang Xu et al. Nanoscale Research Letters
- Ion beam nanopatterning of III-V semiconductors: consistency of experimental and simulation trends within a chemistry-driven theory
- (2015) O. El-Atwani et al. Scientific Reports
- High-resolution direct-write patterning using focused ion beams
- (2014) Leonidas E. Ocola et al. MRS BULLETIN
- Exploring cryogenic focused ion beam milling as a Group III–V device fabrication tool
- (2014) Melissa Commisso Dolph et al. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
- Spontaneous Growth of Gallium-Filled Microcapillaries on Ion-Bombarded GaN
- (2013) Aurelien Botman et al. PHYSICAL REVIEW LETTERS
- Mechanisms of nanodot formation under focused ion beam irradiation in compound semiconductors
- (2011) K. A. Grossklaus et al. JOURNAL OF APPLIED PHYSICS
- XeF2gas-assisted focused-electron-beam-induced etching of GaAs with 30 nm resolution
- (2010) A Ganczarczyk et al. NANOTECHNOLOGY
- Etching of Graphene Devices with a Helium Ion Beam
- (2009) Max C. Lemme et al. ACS Nano
- Subsurface damage from helium ions as a function of dose, beam energy, and dose rate
- (2009) Richard Livengood et al. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
- Highly Ordered Ga Nanodroplets on a GaAs Surface Formed by a Focused Ion Beam
- (2008) Qiangmin Wei et al. PHYSICAL REVIEW LETTERS
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