A Study of Helium Ion Beam Substrate Interaction Volume on Nanomachining Profiles in Bulk Substrates and Thin Film Membranes

标题
A Study of Helium Ion Beam Substrate Interaction Volume on Nanomachining Profiles in Bulk Substrates and Thin Film Membranes
作者
关键词
-
出版物
MICROSCOPY AND MICROANALYSIS
Volume 18, Issue S2, Pages 808-809
出版商
Cambridge University Press (CUP)
发表日期
2012-11-28
DOI
10.1017/s1431927612005892

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