Direct and Transmission Milling of Suspended Silicon Nitride Membranes With a Focused Helium Ion Beam

标题
Direct and Transmission Milling of Suspended Silicon Nitride Membranes With a Focused Helium Ion Beam
作者
关键词
-
出版物
SCANNING
Volume 34, Issue 2, Pages 101-106
出版商
Wiley
发表日期
2012-02-13
DOI
10.1002/sca.21003

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