Atomic layer lithography of wafer-scale nanogap arrays for extreme confinement of electromagnetic waves
出版年份 2013 全文链接
标题
Atomic layer lithography of wafer-scale nanogap arrays for extreme confinement of electromagnetic waves
作者
关键词
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出版物
Nature Communications
Volume 4, Issue 1, Pages -
出版商
Springer Nature
发表日期
2013-09-03
DOI
10.1038/ncomms3361
参考文献
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