Thermal scanning probe lithography for the directed self-assembly of block copolymers

标题
Thermal scanning probe lithography for the directed self-assembly of block copolymers
作者
关键词
-
出版物
NANOTECHNOLOGY
Volume 28, Issue 17, Pages 175301
出版商
IOP Publishing
发表日期
2017-04-06
DOI
10.1088/1361-6528/aa673c

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