A brief review of atomic layer deposition: from fundamentals to applications

标题
A brief review of atomic layer deposition: from fundamentals to applications
作者
关键词
-
出版物
Materials Today
Volume 17, Issue 5, Pages 236-246
出版商
Elsevier BV
发表日期
2014-05-10
DOI
10.1016/j.mattod.2014.04.026

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