Sub-10-nm nanolithography with a scanning helium beam

标题
Sub-10-nm nanolithography with a scanning helium beam
作者
关键词
-
出版物
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
Volume 27, Issue 4, Pages L18
出版商
American Vacuum Society
发表日期
2009-07-25
DOI
10.1116/1.3182742

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