Abrasive mechanisms and interfacial mechanics of amorphous silicon carbide thin films in chemical-mechanical planarization
出版年份 2020 全文链接
标题
Abrasive mechanisms and interfacial mechanics of amorphous silicon carbide thin films in chemical-mechanical planarization
作者
关键词
Molecular dynamics, Silicon carbide, Amorphous, Nanotribology, Ripple
出版物
JOURNAL OF ALLOYS AND COMPOUNDS
Volume 845, Issue -, Pages 156100
出版商
Elsevier BV
发表日期
2020-07-09
DOI
10.1016/j.jallcom.2020.156100
参考文献
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