Atomistic mechanisms of Cu CMP in aqueous H2O2: Molecular dynamics simulations using ReaxFF reactive force field

出版年份 2018 全文链接

标题

Atomistic mechanisms of Cu CMP in aqueous H2O2: Molecular dynamics simulations using ReaxFF reactive force field

作者

关键词

-

出版物

COMPUTATIONAL MATERIALS SCIENCE

Volume 155, Issue -, Pages 476-482

出版商

Elsevier BV

发表日期

2018-09-15

DOI

10.1016/j.commatsci.2018.09.022

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