Material removal mechanism during porous silica cluster impact on crystal silicon substrate studied by molecular dynamics simulation

标题
Material removal mechanism during porous silica cluster impact on crystal silicon substrate studied by molecular dynamics simulation
作者
关键词
-
出版物
APPLIED SURFACE SCIENCE
Volume 264, Issue -, Pages 148-156
出版商
Elsevier BV
发表日期
2012-10-16
DOI
10.1016/j.apsusc.2012.09.147

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