Abrasive mechanisms and interfacial mechanics of amorphous silicon carbide thin films in chemical-mechanical planarization

Interfacial mechanics and shear deformation of indented germanium on silicon (001) using molecular dynamics

(2020) Van-Trung Pham et al.   VACUUM

Molecular dynamics simulation of SiC removal mechanism in a fixed abrasive polishing process

(2019) Piao Zhou et al.   CERAMICS INTERNATIONAL

Thermoluminescence dosimetric properties of silicon carbide (SiC) used in industrial applications

(2019) Hüseyin Toktamiş et al.   APPLIED RADIATION AND ISOTOPES

MD simulation of stress-assisted nanometric cutting mechanism of 3C silicon carbide

(2019) Lei Liu et al.   INDUSTRIAL LUBRICATION AND TRIBOLOGY

Molecular dynamics simulation of abrasive characteristics and interfaces in chemical mechanical polishing

(2019) Van-Thuc Nguyen et al.   APPLIED SURFACE SCIENCE

Material removal and interactions between an abrasive and a SiC substrate: A molecular dynamics simulation study

(2019) Van-Thuc Nguyen et al.   CERAMICS INTERNATIONAL

Molecular dynamics simulations of extended defects and their evolution in 3C–SiC by different potentials

(2019) Andrey Sarikov et al.   MODELLING AND SIMULATION IN MATERIALS SCIENCE AND ENGINEERING

Tip-based nanomanufacturing process of single crystal SiC: Ductile deformation mechanism and process optimization

(2019) Binbin Meng et al.   APPLIED SURFACE SCIENCE

Pile-up and heat effect on the mechanical response of SiGe on Si(0 0 1) substrate during nanoscratching and nanoindentation using molecular dynamics

(2019) Van-Trung Pham et al.   COMPUTATIONAL MATERIALS SCIENCE

Atomistic scale nanoscratching behavior of monocrystalline Cu influenced by water film in CMP process

(2018) Junqin Shi et al.   APPLIED SURFACE SCIENCE

Ductile-brittle transition behavior in the ultrasonic vibration-assisted internal grinding of silicon carbide ceramics

(2018) Jianguo Cao et al.   INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY

Characterization of femtosecond-laser-induced periodic structures on SiC substrates

(2018) Reina Miyagawa et al.   JAPANESE JOURNAL OF APPLIED PHYSICS

Atomistic insights on the nanoscale single grain scratching mechanism of silicon carbide ceramic based on molecular dynamics simulation

(2018) Yao Liu et al.   AIP Advances

Atomistic mechanisms of Cu CMP in aqueous H2O2: Molecular dynamics simulations using ReaxFF reactive force field

(2018) Xiaoguang Guo et al.   COMPUTATIONAL MATERIALS SCIENCE

Study on the deformation mechanism of spherical diamond indenter and its influence on 3C-SiC sample during nanoindentation process via molecular dynamics simulation

(2018) Bo Zhu et al.   MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING

Atomistic mechanisms of chemical mechanical polishing of diamond (1 0 0) in aqueous H2O2/pure H2O: Molecular dynamics simulations using reactive force field (ReaxFF)

(2018) Xiaoguang Guo et al.   COMPUTATIONAL MATERIALS SCIENCE

Coupling effect on the removal mechanism and surface/subsurface characteristics of SiC during grinding process at the nanoscale

(2018) Binbin Meng et al.   CERAMICS INTERNATIONAL

Material removal model of ultrasonic elliptical vibration-assisted chemical mechanical polishing for hard and brittle materials

(2017) Defu Liu et al.   INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY

Polishing-pad-free electrochemical mechanical polishing of single-crystalline SiC surfaces using polyurethane–CeO2 core–shell particles

(2017) Junji Murata et al.   INTERNATIONAL JOURNAL OF MACHINE TOOLS & MANUFACTURE

Controlling periodic ripple microstructure formation on 4H-SiC crystal with three time-delayed femtosecond laser beams of different linear polarizations

(2017) Wanlin He et al.   OPTICS EXPRESS

A study on the surface quality and brittle–ductile transition during the elliptical vibration-assisted nanocutting process on monocrystalline silicon via molecular dynamic simulations

(2017) Bo Zhu et al.   RSC Advances

Influence of laser nanostructured diamond tools on the cutting behavior of silicon by molecular dynamics simulation

(2017) Houfu Dai et al.   RSC Advances

The Polishing Effect of SiC Substrates in Femtosecond Laser Irradiation Assisted Chemical Mechanical Polishing (CMP)

(2017) Chengwu Wang et al.   ECS Journal of Solid State Science and Technology

Atomistic Mechanisms of Chemical Mechanical Polishing of a Cu Surface in Aqueous H2O2: Tight-Binding Quantum Chemical Molecular Dynamics Simulations

(2016) Kentaro Kawaguchi et al.   ACS Applied Materials & Interfaces

Dimensional isotropy of 6H and 3C SiC under neutron irradiation

(2016) Lance L. Snead et al.   JOURNAL OF NUCLEAR MATERIALS

Molecular dynamics simulation study of deformation mechanisms in 3C–SiC during nanometric cutting at elevated temperatures

(2016) Saeed Zare Chavoshi et al.   MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING

Molecular dynamics modelling of brittle–ductile cutting mode transition: Case study on silicon carbide

(2015) Gaobo Xiao et al.   INTERNATIONAL JOURNAL OF MACHINE TOOLS & MANUFACTURE

Material science and device physics in SiC technology for high-voltage power devices

(2015) Tsunenobu Kimoto   JAPANESE JOURNAL OF APPLIED PHYSICS

Atomistic-based predictions of crack tip behavior in silicon carbide across a range of temperatures and strain rates

(2014) K.W.K. Leung et al.   ACTA MATERIALIA

The current understanding on the diamond machining of silicon carbide

(2014) Saurav Goel   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Atomic-scale flattening mechanism of 4H-SiC (0 0 0 1) in plasma assisted polishing

(2013) H. Deng et al.   CIRP ANNALS-MANUFACTURING TECHNOLOGY

Damage-free machining of monocrystalline silicon carbide

(2013) Hiroaki Tanaka et al.   CIRP ANNALS-MANUFACTURING TECHNOLOGY

Screened empirical bond-order potentials for Si-C

(2013) Lars Pastewka et al.   PHYSICAL REVIEW B

Y2O3 nanosheets as slurry abrasives for chemical-mechanical planarization of copper

(2013) Xingliang He et al.   Friction

Material removal mechanism during porous silica cluster impact on crystal silicon substrate studied by molecular dynamics simulation

(2012) Ruling Chen et al.   APPLIED SURFACE SCIENCE

Chemical Mechanical Planarization from Macro-Scale to Molecular-Scale

(2012) Y. Wang et al.   MATERIALS AND MANUFACTURING PROCESSES

A study on phase transformation of monocrystalline silicon due to ultra-precision polishing by molecular dynamics simulation

(2012) Lin Zhang et al.   AIP Advances

Plasma assisted polishing of single crystal SiC for obtaining atomically flat strain-free surface

(2011) K. Yamamura et al.   CIRP ANNALS-MANUFACTURING TECHNOLOGY

Abrasive rolling effects on material removal and surface finish in chemical mechanical polishing analyzed by molecular dynamics simulation

(2011) Lina Si et al.   JOURNAL OF APPLIED PHYSICS

Raman spectroscopic study of femtosecond laser-induced phase transformation associated with ripple formation on single-crystal SiC

(2010) Makoto Yamaguchi et al.   APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING

Molecular dynamics investigations on polishing of a silicon wafer with a diamond abrasive

(2010) Paras M. Agrawal et al.   APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING

Ultrasonic flexural vibration assisted chemical mechanical polishing for sapphire substrate

(2010) Wenhu Xu et al.   APPLIED SURFACE SCIENCE

Monoatomic layer removal mechanism in chemical mechanical polishing process: A molecular dynamics study

(2010) Lina Si et al.   JOURNAL OF APPLIED PHYSICS

Polishing behaviors of ceria abrasives on silicon dioxide and silicon nitride CMP

(2010) Myoung-Hwan Oh et al.   POWDER TECHNOLOGY

Cross-sectional morphological profiles of ripples on Si, SiC, and HOPG

(2009) Takuro Tomita et al.   APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING

Investigation of material removal mechanism of silicon wafer in the chemical mechanical polishing process using molecular dynamics simulation method

(2009) Xuesong Han et al.   APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING

Understanding the changes in mechanical properties due to the crystalline-to-amorphization transition in SiC

(2009) Kun Xue et al.   JOURNAL OF APPLIED PHYSICS

Visualization and analysis of atomistic simulation data with OVITO–the Open Visualization Tool

(2009) Alexander Stukowski   MODELLING AND SIMULATION IN MATERIALS SCIENCE AND ENGINEERING