The Polishing Effect of SiC Substrates in Femtosecond Laser Irradiation Assisted Chemical Mechanical Polishing (CMP)

Smart Polishing of Hard-to-Machine Materials with an Innovative Dilatancy Pad under High-Pressure, High-Speed, Immersed Condition

(2016) Toshiro K. Doi et al.   ECS Journal of Solid State Science and Technology

Performance of colloidal silica and ceria based slurries on CMP of Si-face 6H-SiC substrates

(2015) Guomei Chen et al.   APPLIED SURFACE SCIENCE

The influence of double pulse delay and ambient pressure on femtosecond laser ablation of silicon

(2015) Ying Qi et al.   OPTICS AND LASER TECHNOLOGY

From ripples to spikes: A hydrodynamical mechanism to interpret femtosecond laser-induced self-assembled structures

(2015) George D. Tsibidis et al.   PHYSICAL REVIEW B

Periodic nanostructures self-formed on silicon and silicon carbide by femtosecond laser irradiation

(2014) Laura Gemini et al.   APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING

Ultrafast lasers—reliable tools for advanced materials processing

(2014) Koji Sugioka et al.   Light-Science & Applications

Progressive formation of fine and coarse ripples on SiC surface by repeated irradiation of femtosecond laser pulses

(2013) S. H. Kim et al.   APPLIED PHYSICS B-LASERS AND OPTICS

Fabrication of through holes in silicon carbide using femtosecond laser irradiation and acid etching

(2013) Vanthanh Khuat et al.   APPLIED SURFACE SCIENCE

Bulk micromachining of SiC substrate for MEMS sensor applications

(2013) Gabriel Vanko et al.   MICROELECTRONIC ENGINEERING

Growth of high spatial frequency periodic ripple structures on SiC crystal surfaces irradiated with successive femtosecond laser pulses

(2013) Go Obara et al.   OPTICS EXPRESS

Characterization of 4H-SiC (0001) surface processed by plasma-assisted polishing

(2012) Hui Deng et al.   INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY

Dynamics of ripple formation on silicon surfaces by ultrashort laser pulses in subablation conditions

(2012) G. D. Tsibidis et al.   PHYSICAL REVIEW B

Nanomaterials by Ultrafast Laser Processing of Surfaces

(2012) Emmanuel Stratakis   Science of Advanced Materials

Fabrication of uniform nanogrooves on 6H-SiC by femtosecond laser ablation

(2010) Sung Hoon Kim et al.   APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING

Origin of Laser-Induced Near-Subwavelength Ripples: Interference between Surface Plasmons and Incident Laser

(2009) Min Huang et al.   ACS Nano

Self-organized nanostructure by a femtosecond laser on silicon

(2009) J. M. Li et al.   LASER PHYSICS