Plasma assisted polishing of single crystal SiC for obtaining atomically flat strain-free surface

标题
Plasma assisted polishing of single crystal SiC for obtaining atomically flat strain-free surface
作者
关键词
-
出版物
CIRP ANNALS-MANUFACTURING TECHNOLOGY
Volume 60, Issue 1, Pages 571-574
出版商
Elsevier BV
发表日期
2011-04-19
DOI
10.1016/j.cirp.2011.03.072

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