Y2O3 nanosheets as slurry abrasives for chemical-mechanical planarization of copper

标题
Y2O3 nanosheets as slurry abrasives for chemical-mechanical planarization of copper
作者
关键词
Y<sub>2</sub>O<sub>3</sub> nanosheets, chemical-mechanical planarization (CMP), nanoabrasives, slurry flow, wafer-pad contact
出版物
Friction
Volume 1, Issue 4, Pages 327-332
出版商
Springer Nature
发表日期
2013-07-26
DOI
10.1007/s40544-013-0017-z

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