Material removal model of ultrasonic elliptical vibration-assisted chemical mechanical polishing for hard and brittle materials
出版年份 2017 全文链接
标题
Material removal model of ultrasonic elliptical vibration-assisted chemical mechanical polishing for hard and brittle materials
作者
关键词
Ultrasonic elliptical vibration (UEV), Chemical mechanical polishing (CMP), Material removal rate (MRR), Hard and brittle materials
出版物
INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY
Volume 92, Issue 1-4, Pages 81-99
出版商
Springer Nature
发表日期
2017-02-18
DOI
10.1007/s00170-017-0081-z
参考文献
相关参考文献
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