Effects of high pressure nitrogen annealing on ferroelectric Hf0.5Zr0.5O2 films

标题
Effects of high pressure nitrogen annealing on ferroelectric Hf0.5Zr0.5O2 films
作者
关键词
-
出版物
APPLIED PHYSICS LETTERS
Volume 112, Issue 9, Pages 092906
出版商
AIP Publishing
发表日期
2018-03-02
DOI
10.1063/1.5003369

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