Tiered deposition of sub-5 nm ferroelectric Hf1-xZrxO2 films on metal and semiconductor substrates
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Title
Tiered deposition of sub-5 nm ferroelectric Hf1-xZrxO2 films on metal and semiconductor substrates
Authors
Keywords
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Journal
APPLIED PHYSICS LETTERS
Volume 112, Issue 19, Pages 192901
Publisher
AIP Publishing
Online
2018-05-08
DOI
10.1063/1.5027516
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- (2018) Anna G. Chernikova et al. ACS Applied Materials & Interfaces
- Reliability Study of Ferroelectric Al:HfO2 Thin Films for DRAM and NAND Applications
- (2017) Karine Florent et al. IEEE TRANSACTIONS ON ELECTRON DEVICES
- An extensive study of the influence of dopants on the ferroelectric properties of HfO2
- (2017) S. Starschich et al. Journal of Materials Chemistry C
- Effect of Zr Content on the Wake-Up Effect in Hf1–xZrxO2 Films
- (2016) Min Hyuk Park et al. ACS Applied Materials & Interfaces
- Physical Mechanisms behind the Field-Cycling Behavior of HfO2 -Based Ferroelectric Capacitors
- (2016) Milan Pešić et al. ADVANCED FUNCTIONAL MATERIALS
- Evidence for oxygen vacancies movement during wake-up in ferroelectric hafnium oxide
- (2016) S. Starschich et al. APPLIED PHYSICS LETTERS
- A study on the wake-up effect of ferroelectric Hf0.5Zr0.5O2films by pulse-switching measurement
- (2016) Han Joon Kim et al. Nanoscale
- Structural Changes Underlying Field-Cycling Phenomena in Ferroelectric HfO2Thin Films
- (2016) Everett D. Grimley et al. Advanced Electronic Materials
- Complex Internal Bias Fields in Ferroelectric Hafnium Oxide
- (2015) Tony Schenk et al. ACS Applied Materials & Interfaces
- Broadband enhancement of infrared absorption in microbolometers using Ag nanocrystals
- (2015) Jerome K. Hyun et al. APPLIED PHYSICS LETTERS
- Ferroelectric Si-Doped HfO2 Device Properties on Highly Doped Germanium
- (2015) Patrick D. Lomenzo et al. IEEE ELECTRON DEVICE LETTERS
- The origin of ferroelectricity in Hf1−xZrxO2: A computational investigation and a surface energy model
- (2015) R. Materlik et al. JOURNAL OF APPLIED PHYSICS
- TaN interface properties and electric field cycling effects on ferroelectric Si-doped HfO2 thin films
- (2015) Patrick D. Lomenzo et al. JOURNAL OF APPLIED PHYSICS
- Electric Field Cycling Behavior of Ferroelectric Hafnium Oxide
- (2014) Tony Schenk et al. ACS Applied Materials & Interfaces
- Ferroelectricity in Si-Doped HfO2Revealed: A Binary Lead-Free Ferroelectric
- (2014) Dominik Martin et al. ADVANCED MATERIALS
- Study on the degradation mechanism of the ferroelectric properties of thin Hf0.5Zr0.5O2 films on TiN and Ir electrodes
- (2014) Min Hyuk Park et al. APPLIED PHYSICS LETTERS
- Study on the effect of heat treatment conditions on metalorganic-chemical-vapor-deposited ferroelectric Hf0.5Zr0.5O2thin film on Ir electrode
- (2014) Takao Shimizu et al. JAPANESE JOURNAL OF APPLIED PHYSICS
- Ferroelectric properties and switching endurance of Hf0.5Zr0.5O2films on TiN bottom and TiN or RuO2top electrodes
- (2014) Min Hyuk Park et al. Physica Status Solidi-Rapid Research Letters
- Wake-up effects in Si-doped hafnium oxide ferroelectric thin films
- (2013) Dayu Zhou et al. APPLIED PHYSICS LETTERS
- Effect of forming gas annealing on the ferroelectric properties of Hf0.5Zr0.5O2 thin films with and without Pt electrodes
- (2013) Min Hyuk Park et al. APPLIED PHYSICS LETTERS
- Ten-Nanometer Ferroelectric $\hbox{Si:HfO}_{2}$ Films for Next-Generation FRAM Capacitors
- (2012) Stefan Mueller et al. IEEE ELECTRON DEVICE LETTERS
- Reliability Characteristics of Ferroelectric $ \hbox{Si:HfO}_{2}$ Thin Films for Memory Applications
- (2012) Stefan Mueller et al. IEEE TRANSACTIONS ON DEVICE AND MATERIALS RELIABILITY
- Ferroelectricity in Simple Binary ZrO2 and HfO2
- (2012) Johannes Müller et al. NANO LETTERS
- Impact of layer thickness on the ferroelectric behaviour of silicon doped hafnium oxide thin films
- (2012) Ekaterina Yurchuk et al. THIN SOLID FILMS
- Ferroelectricity in hafnium oxide thin films
- (2011) T. S. Böscke et al. APPLIED PHYSICS LETTERS
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