Tiered deposition of sub-5 nm ferroelectric Hf1-xZrxO2 films on metal and semiconductor substrates

Title
Tiered deposition of sub-5 nm ferroelectric Hf1-xZrxO2 films on metal and semiconductor substrates
Authors
Keywords
-
Journal
APPLIED PHYSICS LETTERS
Volume 112, Issue 19, Pages 192901
Publisher
AIP Publishing
Online
2018-05-08
DOI
10.1063/1.5027516

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