Effect on passivation mechanism and properties of HfO2/crystalline-Si interface under different annealing atmosphere

In-situ PECVD-based stoichiometric SiO2 layer for semiconductor devices

(2023) Duy Phong Pham et al.   OPTICAL MATERIALS

Effect of annealing on properties and performance of HfO2/SiO2 optical coatings for UV-applications

(2022) Matthias Falmbigl et al.   OPTICS EXPRESS

Silicon Passivation by Ultrathin Hafnium Oxide Layer for Photoelectrochemical Applications

(2022) Laurynas Staišiūnas et al.   Frontiers in Chemistry

Mechanisms of Silicon Surface Passivation by Negatively Charged Hafnium Oxide Thin Films

(2022) Ailish Wratten et al.   IEEE Journal of Photovoltaics

Passivation properties of HfO2-SiO2 mixed metal oxide thin films with low reflectivity on silicon substrates for semiconductor devices

(2021) Abdullah Uzum et al.   THIN SOLID FILMS

Performance of H-diamond MOSFETs with high temperature ALD grown HfO2 dielectric

(2020) Zeyang Ren et al.   DIAMOND AND RELATED MATERIALS

Influence of layer thickness on passivation properties in SiOx/Al2O3 stacks

(2020) Anton Ek et al.   JOURNAL OF APPLIED PHYSICS

Temperature-Dependent HfO2/Si Interface Structural Evolution and its Mechanism

(2019) Xiao-Ying Zhang et al.   Nanoscale Research Letters

Low-temperature, high-growth-rate ALD of SiO2 using aminodisilane precursor

(2019) Taewook Nam et al.   APPLIED SURFACE SCIENCE

Analysis of the Bowing Phenomenon for Thin c-Si Solar Cells using Partially Processed c-Si Solar Cells

(2019) Jong Rok Lim et al.   Energies

Investigation of c-Si surface passivation using thermal ALD deposited HfO2 films

(2019) Adel B. Gougam et al.   MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING

Impact of HfO2 as a Passivation Layer in the Solar Cell Efficiency Enhancement in Passivated Emitter Rear Cell Type

(2019) Rajesh Kumar Jha et al.   JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY

Hydrogen passivation of silicon/silicon oxide interface by atomic layer deposited hafnium oxide and impact of silicon oxide underlayer

(2018) Evan Oudot et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Investigation of HfO2 Thin Films on Si by X-ray Photoelectron Spectroscopy, Rutherford Backscattering, Grazing Incidence X-ray Diffraction and Variable Angle Spectroscopic Ellipsometry

(2018) Xuguang Luo et al.   Crystals

Surface passivation of crystalline silicon solar cells: Present and future

(2018) Jan Schmidt et al.   SOLAR ENERGY MATERIALS AND SOLAR CELLS

Enhanced field effect passivation of c-Si surface via introduction of trap centers: Case of hafnium and aluminium oxide bilayer films deposited by thermal ALD

(2018) Jagannath Panigrahi et al.   SOLAR ENERGY MATERIALS AND SOLAR CELLS

Explorative studies of novel silicon surface passivation materials: Considerations and lessons learned

(2018) L.E. Black et al.   SOLAR ENERGY MATERIALS AND SOLAR CELLS

Efficiency improvement of PERC solar cell using an aluminum oxide passivation layer prepared via spatial atomic layer deposition and post-annealing

(2018) Chia-Hsun Hsu et al.   SURFACE & COATINGS TECHNOLOGY

Surface Passivation of Silicon Using HfO2 Thin Films Deposited by Remote Plasma Atomic Layer Deposition System

(2017) Xiao-Ying Zhang et al.   Nanoscale Research Letters

Surface Passivation Properties of ${\textrm{HfO}}_{2}$ Thin Film on n-Type Crystalline Si

(2017) Xuemei Cheng et al.   IEEE Journal of Photovoltaics

Surface Passivation of Silicon Using HfO2 Thin Films Deposited by Remote Plasma Atomic Layer Deposition System

(2017) Xiao-Ying Zhang et al.   Nanoscale Research Letters

Simulation and Fabrication of HfO2 Thin Films Passivating Si from a Numerical Computer and Remote Plasma ALD

(2017) Xiao-Ying Zhang et al.   Applied Sciences-Basel

Silicon surface passivation using thin HfO 2 films by atomic layer deposition

(2015) Jhuma Gope et al.   APPLIED SURFACE SCIENCE

Advanced passivation techniques for Si solar cells with high-κ dielectric materials

(2014) Huijuan Geng et al.   APPLIED PHYSICS LETTERS

Symmetrical Al2O3-based passivation layers for p- and n-type silicon

(2014) Daniel K. Simon et al.   SOLAR ENERGY MATERIALS AND SOLAR CELLS

Advances in surface passivation and emitter optimization techniques of c-Si solar cells

(2013) Mohammad Ziaur Rahman   RENEWABLE & SUSTAINABLE ENERGY REVIEWS

Reliability assessment of ultra-thin HfO2 films deposited on silicon wafer

(2012) Wei-En Fu et al.   APPLIED SURFACE SCIENCE

Passivation Properties of Atomic-Layer-Deposited Hafnium and Aluminum Oxides on Si Surfaces

(2012) Jun Wang et al.   IEEE TRANSACTIONS ON ELECTRON DEVICES

Controlling the fixed charge and passivation properties of Si(100)/Al2O3 interfaces using ultrathin SiO2 interlayers synthesized by atomic layer deposition

(2011) G. Dingemans et al.   JOURNAL OF APPLIED PHYSICS