Passivation properties of HfO2-SiO2 mixed metal oxide thin films with low reflectivity on silicon substrates for semiconductor devices

Comparison between thermal and plasma enhanced atomic layer deposition processes for the growth of HfO2 dielectric layers

(2020) Raffaella Lo Nigro et al.   JOURNAL OF CRYSTAL GROWTH

Investigation of crystalline silicon surface passivation by positively charged PO x /Al 2 O 3 stacks

(2018) Lachlan E. Black et al.   SOLAR ENERGY MATERIALS AND SOLAR CELLS

SiO 2 surface passivation layers – a key technology for silicon solar cells

(2018) Stefan W. Glunz et al.   SOLAR ENERGY MATERIALS AND SOLAR CELLS

Surface passivation of crystalline silicon solar cells: Present and future

(2018) Jan Schmidt et al.   SOLAR ENERGY MATERIALS AND SOLAR CELLS

Effect of heat treatment on properties of HfO 2 film deposited by ion-beam sputtering

(2017) Huasong Liu et al.   OPTICAL MATERIALS

Surface Passivation Properties of ${\textrm{HfO}}_{2}$ Thin Film on n-Type Crystalline Si

(2017) Xuemei Cheng et al.   IEEE Journal of Photovoltaics

Simulation and Fabrication of HfO2 Thin Films Passivating Si from a Numerical Computer and Remote Plasma ALD

(2017) Xiao-Ying Zhang et al.   Applied Sciences-Basel

Non-Vacuum Processed Polymer Composite Antireflection Coating Films for Silicon Solar Cells

(2016) Abdullah Uzum et al.   Energies

Interface and electrical properties of ultra-thin HfO2 film grown by radio frequency sputtering

(2016) Madhuchhanda Nath et al.   PHYSICA B-CONDENSED MATTER

Electronic properties of hafnium oxide: A contribution from defects and traps

(2016) Vladimir A. Gritsenko et al.   PHYSICS REPORTS-REVIEW SECTION OF PHYSICS LETTERS

Plasma assisted atomic layer deposited hafnium oxide films for silicon surface passivation

(2016) Rajbir Singh et al.   RSC Advances

Studies on RF magnetron sputtered HfO2 thin films for microelectronic applications

(2015) P. Kondaiah et al.   Electronic Materials Letters

Relation of lifetime to surface passivation for atomic-layer-deposited Al2O3 on crystalline silicon solar cell

(2015) Young Joon Cho et al.   Materials Science and Engineering B-Advanced Functional Solid-State Materials

Relation of lifetime to surface passivation for atomic-layer-deposited Al2O3 on crystalline silicon solar cell

(2015) Young Joon Cho et al.   Materials Science and Engineering B-Advanced Functional Solid-State Materials

Passivation characteristics of SiNx/a-Si and SiNx/Si-rich-SiNx stacked layers on crystalline silicon

(2012) Trinh Cham Thi et al.   SOLAR ENERGY MATERIALS AND SOLAR CELLS

Microstructural and thermal investigations of HfO2 nanoparticles

(2012) Girija S. Chaubey et al.   RSC Advances

X-ray Photoelectron Spectroscopy Depth Profiling of La2O3/Si Thin Films Deposited by Reactive Magnetron Sputtering

(2011) C. V. Ramana et al.   ACS Applied Materials & Interfaces

Enhanced optical constants of nanocrystalline yttrium oxide thin films

(2011) C. V. Ramana et al.   APPLIED PHYSICS LETTERS

Comparison between SiOC Thin Film by plasma enhance chemical vapor deposition and SiO2 Thin Film by Fourier Transform Infrared Spectroscopy

(2010) teresa OH et al.   JOURNAL OF THE KOREAN PHYSICAL SOCIETY

Electronic structure and charge transport properties of amorphous Ta2O5 films

(2008) V.A. Shvets et al.   JOURNAL OF NON-CRYSTALLINE SOLIDS

Physical properties of high pressure reactively sputtered hafnium oxide

(2008) M. Toledano-Luque et al.   VACUUM